In-chip microstructures and photonic devices

Start Date and End Date

30 September 2015
30 September 2017

Turkish Partner(s)

İhsan Doğramacı Bilkent University


Dr. Onur TOKEL


145,846 Euro


Horizon 2020 Marie-Curie

Project Web Page

Scientific Outputs

This project aims to demonstrate a new type of silicon device, that is “in-chip” or buried elements. We realize this by, first, creating laser-induced, controlled subsurface modifications deep inside silicon, without damaging the wafer above or below. Then, we exploit nonlinear laser interactions to create micrometer features with high control in three dimensions, and use them as building blocks for proof-of-concept optical and MEMS-type devices.


Tackling ‘grand’ or societal challenges

As every electronic consumer is probably aware, in recent years, the computer clock rates have not been increasing as they used to. This is due to a fundamental problem in heat removal. The faster the processor runs, the more heat it generates, and this excess heat forces the industry to cap processor speed. A possible solution is suggested as using a cooling liquid, that is passing directly inside the wafer, close to hot spots. However, there was no method to fabricate such cooling channels. We have recently demonstrated a potential solution to this problem, among others, by fabricating functional subsurface elements (Tokel, Nature Photonics, 11, 639, 2017). The proof-of-concept microchannels are shown to cool wafer surfaces rapidly. For further information, please visit the webpage.

Industrial Innovation (including innovation in services as well as products and processes)

Silicon is the crown jewel of electronics, si-photonics and photovoltaic industries. The new capability of creating subsurface microstructures with lasers is expected to open new and exciting applications, including various functional optical and mircoelements, and facilitate further electronic-photonic integration.

Research-influenced changes in policy, agenda-setting

The provision of Improved Public Goods

The improved exercise of professional skill

Human capital development

The aim of the Marie S. Curie Individual Fellowships is meant to support the best, most promising individual researchers. Dr. Tokel is a good example for this aim, as he has started to work at Bilkent University Physics Department as an Assistant Professor after his fellowship, and he continues to contribute to European Research Area.